| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment apparatus and an object storage apparatus which can omit the remote conveyance of objects on the treatment of the objects in the storage apparatus, and can achieve the shortage of time and the simplification of operations and mechanisms on the delivery of the objects. SOLUTION: The treatment apparatus 15 and the object storage apparatus 13 include the treatment apparatus having a movable stage 2 for setting the objects to be treated, and a treatment unit 144 quipped with a robot arm 4 disposed on the stage 2, and the object storage apparatus 13 having a conveyance container 1 for storing the objects, a stocker for storing the objects together with the conveyance container 1 and capable of being slid to a delivery position, and a support mechanism 3 for supporting the conveyance container 1 in a state capable of being moved, while attenuating vibrations, a holding mechanism for positioning the conveyance container 1 disposed on the stage 2 and the stocker, and a guide mechanism disposed on the stage 2 and the stocker. COPYRIGHT: (C)2011,JPO&INPIT
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