| 发明名称 |
TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD |
| 摘要 |
A titania-doped quartz glass which experiences a reduction in OH group concentration of less than or equal to 100 ppm upon heat treatment at 900° C. for 100 hours is suitable as the EUV lithography member.
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| 申请公布号 |
US2011159413(A1) |
申请公布日期 |
2011.06.30 |
| 申请号 |
US20100967175 |
申请日期 |
2010.12.14 |
| 申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
MAIDA SHIGERU;OTSUKA HISATOSHI;UEDA TETSUJI;EZAKI MASANOBU |
| 分类号 |
G03F1/00;C03B8/04;C03B19/00;C03B20/00;C03C3/04;C03C3/06;G02B3/00;G02B5/08 |
主分类号 |
G03F1/00 |
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