发明名称 GATE ELECTRODE HAVING A CAPPING LAYER
摘要 A method of manufacturing a semiconductor device and a novel semiconductor device are disclosed herein. An exemplary method includes sputtering a capping layer in-situ on a gate dielectric layer, before any high temperature processing steps are performed.
申请公布号 US2011156174(A1) 申请公布日期 2011.06.30
申请号 US201113044356 申请日期 2011.03.09
申请人 发明人 DEWEY GILBERT;DOCZY MARK L.;DATTA SUMAN;BRASK JUSTIN K.;METZ MATTHEW V.
分类号 H01L29/78 主分类号 H01L29/78
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