发明名称 THIN FILM SOLAR CELL AND METHODE FOR FABRICATING THE SAME
摘要 PURPOSE: A thin film solar cell and method for fabricating the same are provided to increase inner light reflective efficiency by including an uneven layer having a hemispherical groove thereon. CONSTITUTION: In a thin film solar cell and method for fabricating the same, a base layer for forming uneven layer(102) is formed on a substrate(101). A mask layer(111) is formed on a base layer by using a material which is growth into a columnar structure A nano size hole is formed by etching a mask layer and a base layer through an etch gas. The base layer is isotropic-etched through the hole of the mask layer. An even layer including a plurality of hemispherical grooves is formed on the substrate.
申请公布号 KR20110074252(A) 申请公布日期 2011.06.30
申请号 KR20090131164 申请日期 2009.12.24
申请人 LG DISPLAY CO., LTD. 发明人 KIM, MIN CHEOL;PARK, SEONG KEE;KIM, JAE HYUN;LIM, JUNG SHIK;LEE, TAE YOUNG
分类号 H01L31/0445 主分类号 H01L31/0445
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