发明名称 BACKSIDE ILLUMINATION IMAGE SENSOR AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A backside light receiving image sensor and a method for manufacturing the same are provided to improve the alignment characteristic of a color filter and a micro lens, based on the reflecting signal of a photo key which is protruded while a color filter aligning process. CONSTITUTION: A pixel region and a scribe lane are defined on a semiconductor substrate. A photo detecting part is formed in the pixel region of the front side of the semiconductor substrate. A photo key(150) is formed in the scribe lane of the back side of the semiconductor substrate. A color filter(190) and a micro lens are formed on a passivation layer(170) to be corresponded to the photo detecting part. A liner oxide film is formed along the backside surface profile of the semiconductor substrate including the photo key.
申请公布号 KR20110072518(A) 申请公布日期 2011.06.29
申请号 KR20090129489 申请日期 2009.12.23
申请人 DONGBU HITEK CO., LTD. 发明人 YUN, YOUNG JE
分类号 H01L27/146 主分类号 H01L27/146
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