| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a simple and compact mechanism which makes improvements in positioning precision and is capable of being used in an environment that avoids being magnetized. <P>SOLUTION: A stage including a first mobile object freely movable in a first direction and a second mobile object, freely movable in a second direction different from the first direction, which moves in the first direction together with the first mobile object, is characterized by including a first ultrasonic motor for moving the first mobile object in the first direction by making contact with the first mobile object and a second ultrasonic motor for moving the second mobile object in the second direction by making contact with the second mobile object. <P>COPYRIGHT: (C)2008,JPO&INPIT |
