发明名称 APPARATUS FOR BONDING SEMICONDUCTOR CHIP
摘要 PURPOSE: A semiconductor chip bonding apparatus is provided to reduce required for a substrate driving unit by separating the substrate driving unit into two driving parts based on the stroke and the position precision. CONSTITUTION: A chip absorbing unit(100) absorbs a semiconductor chip(10) at an initial position. The chip absorbing unit includes an absorbing part(110), an elevation driving part, and a mode converting part(130). A substrate supporting plate supports a printed circuit board(20). A chip transporting unit transports the chip absorbing unit. A substrate driving unit transfers or rotates the substrate supporting plate.
申请公布号 KR101044622(B1) 申请公布日期 2011.06.29
申请号 KR20110004215 申请日期 2011.01.14
申请人 IPS SYSTEM CO., LTD. 发明人 LEE, SU JIN
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址