A DEVICE FOR LOADING-UNLOADING SUBSTRATE

摘要

PURPOSE: A device for loading and unloading a substrate is provided to shorten tact time by efficiently supporting a lifting shaft which moves up and down. CONSTITUTION: A clamp plate(120) is arranged on a bottom plate. A lift pin plate(110) is arranged on the clamp plate. A lifting shaft(140) passes through the clamp plate and supports the lift pin plate. A lifting driving unit drives the lifting shaft up and down. A first guide unit is arranged on the bottom plate and guides a lifting shaft. A second guide unit is arranged on the first guide unit and guides the lifting shaft.