<p>The scanner (1) has a mirror for deflecting laser radiation emitted by a laser source (2) and designed as a micro-electromechanical adjustable mirror (3). A rotationally-symmetrical deflection body (4) deflects the laser radiation to an object. A detector (5) detects the radiation reflected from the object. A controlling and evaluation unit (6) controls the laser source, excites oscillating movement of the mirror and evaluates the detected radiation. A synchronization unit is provided for synchronizing movement of the mirror and position of the detector at which the radiation is detected.</p>
申请公布号
EP2339367(A1)
申请公布日期
2011.06.29
申请号
EP20090179560
申请日期
2009.12.17
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
SCHEIBNER, DIRK, DR.;THAMM, PETER, DR.;VOELKEL, THOMAS;ZETTNER, JUERGEN, DR.