发明名称 |
THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF |
摘要 |
<p>PURPOSE: A thin film transistor and manufacturing method thereof are provided to increase the carrier mobility of an interfacial area, thereby increasing the field effect mobility of the thin film transistor. CONSTITUTION: A gate insulating layer(104) covers a first wiring layer. A first semiconductor layer is overlapped with the entire surface of a first wiring layer. A second semiconductor layer(108) contacts the first semiconductor layer and has lower carrier mobility than the first semiconductor layer. A dopant semiconductor layer(110) is adjacent to the second semiconductor layer. A sidewall insulating layer covers at least a side of the first semiconductor layer. A second wiring layer contacts the dopant semiconductor layer.</p> |
申请公布号 |
KR20110073278(A) |
申请公布日期 |
2011.06.29 |
申请号 |
KR20100128062 |
申请日期 |
2010.12.15 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
SASAGAWA SHINYA;ISHIZUKA AKIHIRO;FURUKAWA SHINOBU;KURATA MOTOMU |
分类号 |
H01L29/786;G02F1/136 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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