发明名称 THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF
摘要 <p>PURPOSE: A thin film transistor and manufacturing method thereof are provided to increase the carrier mobility of an interfacial area, thereby increasing the field effect mobility of the thin film transistor. CONSTITUTION: A gate insulating layer(104) covers a first wiring layer. A first semiconductor layer is overlapped with the entire surface of a first wiring layer. A second semiconductor layer(108) contacts the first semiconductor layer and has lower carrier mobility than the first semiconductor layer. A dopant semiconductor layer(110) is adjacent to the second semiconductor layer. A sidewall insulating layer covers at least a side of the first semiconductor layer. A second wiring layer contacts the dopant semiconductor layer.</p>
申请公布号 KR20110073278(A) 申请公布日期 2011.06.29
申请号 KR20100128062 申请日期 2010.12.15
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 SASAGAWA SHINYA;ISHIZUKA AKIHIRO;FURUKAWA SHINOBU;KURATA MOTOMU
分类号 H01L29/786;G02F1/136 主分类号 H01L29/786
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