| 摘要 |
<p>PURPOSE: A nozzle carrier of a substrate coater is provided to secure a structural stability by firmly supporting the weight of the nozzle carrier. CONSTITUTION: A nozzle assembly fixes a slit nozzle which coats the chemical on a substrate on a stage. A nozzle carrier(140) transports the slit nozzle to pass the upper side of the substrate. The nozzle carrier is located on the lower side of the nozzle assembly and is combined with the nozzle assembly. The cross section in a vertical direction to a moving direction of the nozzle carrier is comprised of a top plate, a bottom plate, and a connection plate which connects the top plate and the bottom plate. A top protrusion(141a) and a bottom protrusion(142a) are protruded from the combination position of the connection plate in one direction. A pillar is interposed between the top protrusion and the bottom protrusion.</p> |
