Multilayer sheet, production method thereof and pressure-sensitive adhesive sheet using the multilayer sheet

摘要

To provide a pressure-sensitive adhesive sheet used during processing articles such as semiconductor wafers and laminate sheet used for such a pressure-sensitive adhesive sheet, which does not contaminate or break the semiconductor wafers during the processing and can minimize the curl of the articles due to residual stress of the pressure-sensitive adhesive sheet, a multi-layer sheet includes a composite film (2) containing a urethane polymer and a vinyl-based polymer as effective components and a first film (1) made of a material different from that of the composite film (2), wherein the urethane polymer is formed from a polyolefin diol and a polyisocyanate. A pressure-sensitive adhesive sheet is obtained by providing a pressure-sensitive adhesive layer (4) on at least one side of the multi-layer sheet.