FLEXIBLE THERMOELECTRIC GENERATOR AND WIRELESS SENSOR NODE COMPRISING THE SAME

摘要

PURPOSE: A flexible thermoelectric device, a wireless sensor node with the same, and a manufacturing method thereof are provided to sense a temperature change amount by an output voltage of the flexible thermoelectric device, thereby realizing a wireless sensor structure of a simple structure. CONSTITUTION: A plurality of P-type semiconductors(210) and a plurality of N-type semiconductors make a pair. A lower metal(230) electrically connects the bottom of the P-type semiconductors with the bottom of the N-type semiconductors. An upper metal(250) electrically connects the top of the P-type semiconductors with the top of the N-type semiconductors. An upper protection film is attached to the upper recess of a structure which comprises the P-type semiconductors, a P-type metal, the N-type semiconductors, an N-type metal, and the upper metal. A lower protection film is attached to the lower recess of the structure.