发明名称 Wirebonding Process
摘要 <p>A wirebonding process comprises forming a bond pad (30) with a roughened upper surface (32), lowering a copper wirebond ball (14) onto the roughened bond bad, and applying a force to the wirebond ball against the roughened surface, A heat treatment is applied to form the bond between the wirebond ball and the roughened surface, wherein the bond is formed without use of ultrasonic energy. This process avoids the use of ultrasonic welding and thereby reduces the occurrence of microcracks and resulting Chip Out of the Bond (COUB) and Metal Peel Off (MPO) failures. The roughened surface of the bond pad improves the reliability of the connection.</p>
申请公布号 EP2339622(A1) 申请公布日期 2011.06.29
申请号 EP20090180586 申请日期 2009.12.23
申请人 NXP B.V. 发明人 HOCHSTENBACK, HENDRIK PIETER;VAN DRIEL, WILLEM;OOMS, ERIC
分类号 H01L23/485;H01L21/60;H01L29/06 主分类号 H01L23/485
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