发明名称 Phase change memory elements using self-aligned phase change material layers
摘要 A phase change memory element and method of forming the same. The memory element includes a substrate supporting a first electrode. An insulating material element is positioned over the first electrode, and a phase change material layer is formed over the first electrode and surrounding the insulating material element such that the phase change material layer has a lower surface that is in electrical communication with the first electrode. The memory element also has a second electrode in electrical communication with an upper surface of the phase change material layer.
申请公布号 US7968862(B2) 申请公布日期 2011.06.28
申请号 US20090400044 申请日期 2009.03.09
申请人 MICRON TECHNOLOGY, INC. 发明人 LIU JUN
分类号 H01L47/00 主分类号 H01L47/00
代理机构 代理人
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