GRADIENT FUNCTIONAL COATING ON TRANSPARENT SUBSTRATE

摘要

FIELD: metallurgy. ^ SUBSTANCE: gradient functional coating on transparent substrate consists of first layer of transparent dielectric out of mixture of oxide and nitride of aluminium of 5-40 nm thickness, of layer of copper with thickness 9-14 nm and of external layer of transparent dielectric out of mixture of oxide and nitride of aluminium of 30-45 nm thickness with refractive index diminishing in direction from layer of metal obtained by increased percent content of aluminium oxide in said direction. Transparent layers of dielectric correspond to products of chemical reaction formed at target vacuum sputtering containing aluminium in chemically active gas containing oxygen and nitrogen. The external layer of transparent dielectric is produced with change of partial pressure of oxygen from 0.006 to 0.020 Pa. ^ EFFECT: coating with higher coefficient of attenuation of heat radiation and reduced distortion of colour rendition relative to substrate at maintaining high level of integral coefficient of transmission of visible light and surface resistance of coating. ^ 2 cl, 1 tbl, 1 ex