发明名称 GIROSCOPIO INTEGRATO MICROELETTROMECCANICO CON MIGLIORATA STRUTTURA DI AZIONAMENTO
摘要 <p>An integrated MEMS gyroscope (1; 1'; 1"), is provided with: at least a first driving mass (2a) driven with a first driving movement along a first axis (x) upon biasing of an assembly (13) of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope (1; 1'; 1"); and at least a second driving mass (2b) driven with a second driving movement along a second axis (y), transverse to the first axis (x), the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope (1; 1'; 1"). The integrated MEMS gyroscope is moreover provided with a first elastic coupling element (12a), which elastically couples the first driving mass (2a) and the second driving mass (2b) in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.</p>
申请公布号 ITTO20091042(A1) 申请公布日期 2011.06.25
申请号 IT2009TO01042 申请日期 2009.12.24
申请人 STMICROELECTRONICS S.R.L. 发明人 CAZZANIGA GABRIELE;CORONATO LUCA
分类号 G01C19/56 主分类号 G01C19/56
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