| 摘要 |
PURPOSE: A temperature controlled showerhead for high temperature operation is provided to improve cooling by increasing cooling fluid flow using a temperature controller. CONSTITUTION: A temperature controlled showerhead for high temperature operation comprises a heat transfer stem(304), a back plate(306), a front plate(308), a heating member(504), a heat exchanger(502), and a temperature sensor(506). The back plate is attached to the heat transfer stem. The front plate is attached to the back plate and is thermally combined with the heat transfer stem. The heating member is thermally combined with the heat transfer stem. The heat exchanger is thermally combined with the heat transfer stem. The temperature sensor is thermally combined with the front plate. A thermal transfer path is formed between the heating member and front plate and the heat exchanger and front plate. |
