发明名称 |
METHOD FOR MENUFACTURING RESISTIVE MEMORY DEVICE |
摘要 |
<p>PURPOSE: A method for manufacturing a resistive memory device is provided to reduce manufacturing costs by forming a resistive layer through an oxidation process after a top electrode, transition metal, and an upper electrode are formed. CONSTITUTION: A bottom electrode(11) is comprised of a metal layer including oxygen ions. Transition metal is formed on the bottom electrode. A top electrode(13) is formed on the transition metal. A transition metal oxide layer is formed by oxidizing the transition metal. The transition metal is oxidized by applying voltages to the top electrode or bottom electrode.</p> |
申请公布号 |
KR20110070559(A) |
申请公布日期 |
2011.06.24 |
申请号 |
KR20090127417 |
申请日期 |
2009.12.18 |
申请人 |
HYNIX SEMICONDUCTOR INC. |
发明人 |
SUNG, MIN GYU;KIL, DEOK SIN;KIM, SOOK JOO;KIM, JA YONG |
分类号 |
H01L21/8247;H01L27/115 |
主分类号 |
H01L21/8247 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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