发明名称 METHOD FOR MENUFACTURING RESISTIVE MEMORY DEVICE
摘要 <p>PURPOSE: A method for manufacturing a resistive memory device is provided to reduce manufacturing costs by forming a resistive layer through an oxidation process after a top electrode, transition metal, and an upper electrode are formed. CONSTITUTION: A bottom electrode(11) is comprised of a metal layer including oxygen ions. Transition metal is formed on the bottom electrode. A top electrode(13) is formed on the transition metal. A transition metal oxide layer is formed by oxidizing the transition metal. The transition metal is oxidized by applying voltages to the top electrode or bottom electrode.</p>
申请公布号 KR20110070559(A) 申请公布日期 2011.06.24
申请号 KR20090127417 申请日期 2009.12.18
申请人 HYNIX SEMICONDUCTOR INC. 发明人 SUNG, MIN GYU;KIL, DEOK SIN;KIM, SOOK JOO;KIM, JA YONG
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
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