APPARATUS AND METHOD FOR TREATING SUBSTRATE,申请号KR20090043666-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR TREATING SUBSTRATE
摘要
申请公布号	KR101043714(B1)	申请公布日期	2011.06.24
申请号	KR20090043666	申请日期	2009.05.19
申请人		发明人
分类号	H01L21/306;H01L21/02	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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