发明名称 |
METHOD FOR DESIGNING TWO-DIMENSIONAL ARRAY OVERLAY TARGET SETS AND METHOD AND SYSTEM FOR MEASURING OVERLAY ERRORS USING THE SAME |
摘要 |
A method for designing a two-dimensional array overlay target set comprises the steps of: selecting a plurality of two-dimensional array overlay target sets having different overlay errors; calculating a deviation of a simulated diffraction spectra for each two-dimensional array overlay target set; selecting a sensitive overlay target set by taking the deviations of the simulated diffraction spectra into consideration; and designing a two-dimensional array overlay target set based on the structural parameters of the sensitive overlay target set.
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申请公布号 |
US2011154272(A1) |
申请公布日期 |
2011.06.23 |
申请号 |
US20090648895 |
申请日期 |
2009.12.29 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
HSU WEI TE;KU YI SHA;PANG HSIU LAN;SHYU DEH MING |
分类号 |
G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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