发明名称 |
THIN FILM TUNING-FORK TYPE INFLECTION RESONATOR AND ELECTRIC SIGNAL PROCESSING ELEMENT |
摘要 |
A compact resonator has a wide bandwidth and a small variation of the specific vibration frequency. The resonator is a thin film tuning-fork type inflection resonator in which a thin film made of a piezoelectric material is formed on a substrate on which a lower electrode is formed, and an upper electrode is formed on the piezoelectric thin film.
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申请公布号 |
US2011148257(A1) |
申请公布日期 |
2011.06.23 |
申请号 |
US201113036318 |
申请日期 |
2011.02.28 |
申请人 |
ISOBE ATSUSHI;SHIBAGAKI NOBUHIKO;ASAI KENGO;MATSUMOTO HISANORI |
发明人 |
ISOBE ATSUSHI;SHIBAGAKI NOBUHIKO;ASAI KENGO;MATSUMOTO HISANORI |
分类号 |
H01L41/047;H01L41/04 |
主分类号 |
H01L41/047 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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