发明名称 COMPENSATED MICRO/NANO-RESONATOR WITH IMPROVED CAPACITIVE DETECTION AND METHOD FOR PRODUCING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a resonator in which effects of stray capacitance with respect to output characteristics of the resonator can be reduced or excluded and which can be easily implemented. <P>SOLUTION: The resonator comprises an oscillating element 1 that can be activated with electrostatic power, and a first exciting electrode 2 and a second exciting electrode 3 of the oscillating element 1. An AC signal generator is connected to the first exciting electrode 2 and the second exciting electrode 3 and sends a first signal and a second signal, which have the same amplitude and inverse phases, to the first exciting electrode 2 and the second exciting electrode 3. A first DC voltage source 8 is connected to a third electrode 4, a second DC voltage source 9 is connected to a fourth electrode 5, and an additional electrode 6 is connected to the oscillating element 1 electrically. A signal representing vibration of the oscillating element 1 is provided by the additional electrode 6 formed by an anchoring point of the oscillating element 1 and is biased by a third DC voltage. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011125017(A) 申请公布日期 2011.06.23
申请号 JP20100274265 申请日期 2010.12.09
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 ARCAMONE JULIEN;COLINET ERIC
分类号 H03H9/24;B81B3/00;H03B5/30;H03H3/007 主分类号 H03H9/24
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