PIEZOELECTRIC DEVICE, METHOD FOR MANUFACTURING THE SAME, PIEZOELECTRIC ACTUATOR, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a highly-reliable piezoelectric device that alleviates stress.

SOLUTION: The piezoelectric device 100 includes: a substrate 10; a first electrode 20 formed on the substrate 10; a first piezoelectric material 30 formed on the first electrode 20; a low density region 40 that is formed at a side of the first piezoelectric material 30 and has density lower than that of the first piezoelectric material 30; a second piezoelectric material 50 that is formed to cover the first piezoelectric material 30 and the low density region 40; and a second electrode 60 formed on the second piezoelectric material 50.

COPYRIGHT: (C)2011,JPO&INPIT