| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a planar actuator that can obtain a large amplitude of a movable part without increasing an amount of power to a drive coil, and can make the fine adjustment of the oscillation operation of the movable part. <P>SOLUTION: The planar actuator includes a frame-shaped fixed part 2, the movable part 4 rotatably supported to the inside of the fixed part 2 via a torsion bar 3, the first drive coil 5 which is arranged at the movable part 4 and spirally formed for driving the movable part 4, and an oscillating coil 6 arranged at the fixed part 2. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
