发明名称 |
DIAGNOSIS DEVICE OF RECIPE USED FOR SCANNING ELECTRON MICROSCOPE |
摘要 |
Disclosed is a diagnosis device of a recipe used for a scanning electron microscope that quickly specifies an error causing factor of the recipe due to a process fluctuation or the like. Specifically disclosed is, a diagnosis device of a recipe to operate a scanning electron microscope is provided with a program to make a display device show shift in a score indicating the degree of pattern matching consistency, wherein a condition of the pattern matching is set in the recipe; a deviation of coordinates before and after the pattern matching; changes in information or the like on fluctuation amounts of a lens before and after the execution of automatic focuses.
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申请公布号 |
US2011147587(A1) |
申请公布日期 |
2011.06.23 |
申请号 |
US200913059667 |
申请日期 |
2009.09.16 |
申请人 |
YANG KYOUNGMO;KAKUTA JUNICHI;YAMADA NEE NAKATA YUKARI |
发明人 |
YANG KYOUNGMO;KAKUTA JUNICHI;YAMADA (NEE NAKATA) YUKARI |
分类号 |
H01J37/285 |
主分类号 |
H01J37/285 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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