| 摘要 |
<p>PURPOSE: A substrate processing device is provided to prevent the rear of a wafer from contacting with a substrate loading plate when a wafer is loaded on a substrate loading plate. CONSTITUTION: A substrate loading plate(40) includes two arm units(41a,41b) which are extended with a plate shape. A substrate loading unit(44a,44b) and a misalignment preventing unit(42a,42b) are installed on the leading ends of the substrate loading unit. The misalignment preventing unit prevents the misalignment of a wafer when the wafer is loaded. An attaching unit(52) with an attaching hole(53) is installed on the source of the substrate loading plate.</p> |
