| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide: a light-receiving apparatus capable of precisely detecting output of EUV light; an exposure apparatus; and a method of manufacturing an electronic device. <P>SOLUTION: The present invention relates to the light-receiving apparatus 50 which receives light. The light-receiving apparatus includes: a light-receiving element 60 having a light-receiving surface 60a for receiving the light; and a frame-shaped reflection member 61 including a first end 62a having an opening 62 formed larger than the light-receiving surface 60a; and a reflecting surface 61a provided on an inner side face and reflecting light incident from the opening 62 toward the light-receiving surface 60a. <P>COPYRIGHT: (C)2011,JPO&INPIT |
