| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reticle conveying device capable of attaching a reticle in a suitable position when the reticle is conveyed and attached to an exposure device, even when a protective member protecting the reticle is provided. <P>SOLUTION: A position measuring device 29 measures a position of a position measurement mark 26 formed on the underside of a reticle 1, thereby measuring the position of the reticle 1. A position measuring device 30 measures a position of a position measurement mark 27 formed on the lower surface of a lower lid 2b, thereby measuring the position of the lower lid 2b. When the position of the reticle 1 and the position of the lower lid 2b are known, a relative positional misalignment between the reticle 1 and the lower lid 2b becomes known. Therefore, when the lower lid 2b on which the reticle 1 is mounted is conveyed by a conveying device and set in an exposure device, the position at which the lower lid 2b is stopped is determined taking into consideration the misalignment. As a result, the reticle 1 can be accurately set in the exposure device. <P>COPYRIGHT: (C)2011,JPO&INPIT |
