发明名称 METHOD OF MANUFACTURING METAL OXIDE SEMICONDUCTOR THIN FILM AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a metal oxide semiconductor thin film in which the metal oxide semiconductor thin film can be formed only by a wet method, and a method of manufacturing a three-terminal type electronic device. SOLUTION: In the method of manufacturing the metal oxide semiconductor thin film, a metal oxide semiconductor forming the metal oxide semiconductor thin film is made to adsorb ligand molecules. Further, the method of manufacturing the electronic device having (A) a first electrode and a second electrode and (B) an active layer 20 provided between the first electrode and second electrode 16 includes a process of making the metal oxide semiconductor forming the active layer 20 to adsorb ligand molecules. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011124312(A) 申请公布日期 2011.06.23
申请号 JP20090279291 申请日期 2009.12.09
申请人 SONY CORP 发明人 HIRATA SHINTARO;YASUHARA DAISUKE
分类号 H01L21/312;H01L21/336;H01L21/368;H01L29/786 主分类号 H01L21/312
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