| 摘要 |
PROBLEM TO BE SOLVED: To provide a fork structure that satisfies heat resistance requirement, rigidity requirement, weight-reduction requirement, and large-length requirement with respect to the fork of a hand of a substrate transfer robot. SOLUTION: The fork structure is used for the hand of a substrate transfer robot for applying thin-film processing to a substrate. The fork structure is configured to have a beam-like structure in which a plurality of plate-like members 11, 12, 13 are connected in the width direction, and plural stages of the plurality of connected plate-like members are jointed to one another in the longitudinal direction. The plurality of plate-like members on the base-end side and the plurality of plate-like members on the tip side overlap alternately, at each position where the plurality of connected plate-like members are jointed in the longitudinal direction; and each shear-load transmitting means 51, constituted of mechanical fastening components, such as, a plurality of bolts and nuts 51a or formed by fitting of a concavo surface and a convex surface, is provided at least at two locations at a part where the plurality of plate-like members alternately overlap. COPYRIGHT: (C)2011,JPO&INPIT
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