摘要 |
<p><P>PROBLEM TO BE SOLVED: To make it unnecessary to form a core made of a second material as a light transmission destination to simplify a preparation process. <P>SOLUTION: A spot size converter converts a spot size of light, which is wave-guided into a silicon optical waveguide, to conduct inputting and outputting of light to the outside on an incidence and emission end face. The spot size converter includes: a lower part clad formed on a substrate; a silicon waveguide core formed on the lower part clad; and an upper part clad laminated on the core, the upper part clad comprising only one kind of material. The silicon waveguide core is formed so that its width may be narrowed at a taper part to make it connected to a width-narrow part in the incidence and emission end face and the vicinity thereof. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |