发明名称 IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
摘要 An imprint apparatus performs processing including dispensing of a resin onto an imprint region on a substrate and molding of the dispensed resin using a mold. The imprint apparatus includes a dispenser including a discharge section having an array of ports for discharging the resin, and configured to dispense the resin onto the imprint region; and a controller configured to control the dispenser, during a processing for a plurality of imprint regions of which nominal sizes are the same, such that switching is performed from one subset of the array of ports used for dispensing the resin onto one imprint region to another subset of the array of ports for dispensing the resin onto another imprint region.
申请公布号 US2011151124(A1) 申请公布日期 2011.06.23
申请号 US20100950695 申请日期 2010.11.19
申请人 CANON KABUSHIKI KAISHA 发明人 INA HIDEKI
分类号 B05D3/12;B29C59/02 主分类号 B05D3/12
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