| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern forming method which can obtain a pattern with a superior shape. SOLUTION: The pattern forming method includes a process (1) for applying a composition containing a resin and a solvent on a substrate, a process (2) in which the solvent is removed from a layer applied on the substrate to form a composition layer, a process (3) in which while the composition layer is immersed in water, the pattern surface of a mold is pressed on the composition layer to transfer the pattern of the mold, a process (4) for drying the composition layer with the pattern of the mold transferred, and a process (5) for making the obtained composition layer leave the mold. COPYRIGHT: (C)2011,JPO&INPIT |
