| 摘要 |
A gas sensor capable of a high-accuracy measurement which is realized by a high responsiveness and a strength that prevents a sensor element from being damaged by a stress occurring in assemblage and usage. This gas sensor includes a sensor element formed of an oxygen-ion conductive solid electrolyte as a main component, and the sensor element includes: an internal space to which a measurement gas is introduced from the outside; a first electrode formed on a surface of the internal space; a second electrode formed in a space different from the internal space; and a pumping cell including the first and second electrodes. The pumping cell is operable to pump out oxygen existing in the internal space when a predetermined voltage is applied to between the first and second electrodes. The thickness of the internal space is 50μm or more and 180μm or less.
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