| 摘要 |
PROBLEM TO BE SOLVED: To prevent a probe for the power of a power source from touching other electrodes located next to an electrode corresponding to this probe. SOLUTION: A probe device includes a plurality of plate-like probes arranged with their thickness direction in the right and left direction, and probe holders arranged at intervals in the right and left direction extending in the forward and backward direction. Each probe belongs to any one of a first and second groups of probes each of which includes a plurality of probes. The dimension in the right and left direction of at least the needle tip at the tip of each of the probes belonging to the second group, is larger than that of each of the probes belonging to the first group. COPYRIGHT: (C)2011,JPO&INPIT
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