| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an electrooptical device which displays a high quality image by forming a stacked structure having an efficient layout, in a method for manufacturing the electrooptical device, such as, for example, a liquid crystal device. SOLUTION: The method for manufacturing the electrooptical device includes steps of: forming a first conductive layer (7) on a substrate (10); forming a second conductive layer (8) across a first insulating layer (14); forming a second insulating layer (15); forming a contact hole (33) to penetrate the first and second insulating layer and the second conductive layer; forming an insulating part (8b) by oxidizing an area facing the contact hole in the second conductive layer; and forming a third conductive layer (9) so that the contact hole is filled. COPYRIGHT: (C)2011,JPO&INPIT |
