| 摘要 |
PROBLEM TO BE SOLVED: To maintain high condensing efficiency and to suppress occurrence of smear in a solid-state image pickup device equipped with an in-layer microlens and an on-chip lens. SOLUTION: The solid-state image pickup device includes a light receiving part 101 formed on the upper part of a semiconductor substrate 105, a first interlayer film 109 formed on the semiconductor substrate 105, a refractive film 103 formed in the first interlayer film 109, an in-layer microlens 102 formed on the first interlayer film 109 so as to be positioned on the light receiving part 101, and an on-chip lens 104 formed on the in-layer microlens 102. The refractive film 103 is arranged on the lower side in a region between adjoining in-layer microlenses 102. COPYRIGHT: (C)2011,JPO&INPIT
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