CHARGED PARTICLE BEAM DEVICE, AND SAMPLE OBSERVATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device having a mechanism in which ionic liquid shape and membrane thickness are adjusted to be adhered to samples so as to be suitable for various observations by electronic microscope or processing by ion beam. SOLUTION: The charged particle beam device includes: an ionic liquid holding member having an aperture; an ionic liquid supply portion in order to fill the ionic liquid into the aperture; an observation portion in order to observe the adhesion state of the ionic liquid; and the charged particle beam generation portion in order to irradiate the charged particle beams. The thickness of the ionic liquid to be filled into the aperture is made to be adjustable in order that the samples are observed in a state of floating on the ionic liquid by dispersing the samples inside the ionic liquid or on the surface of the ionic liquid. COPYRIGHT: (C)2011,JPO&INPIT