| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride powder which is obtained by pulverizing AIN sintered compacts occurring as a result of waste disposal, and exhibits a stable sintering performance as a sintering material for AIN sintered compacts. <P>SOLUTION: The aluminum nitride powder is a powder obtained by pulverizing aluminum nitride compacts, has an average particle size of 2-10 μm, includes a micro powder having particle sizes of not larger than 1 μm observed under a 3,000 X electron-microscopic photograph in an amount not larger than 5% in the powder in terms of the surface area ratio, and has a concentration of metallic impurities other than a sintering aid of not greater than 1,500 ppm. The aluminum nitride powder is obtained by preliminarily pulverizing aluminum nitride compacts to desired sizes causing intergranular fracture preferentially and subsequently impact-milling the preliminary pulverized material. <P>COPYRIGHT: (C)2011,JPO&INPIT |
