| 摘要 |
PROBLEM TO BE SOLVED: To provide a developing device not generating a dirt on a substrate by circulating a component of a developer mixed into a washing tank when replacing the developer with washing water in a water-replacing step. SOLUTION: A circulation tank ST1 supplying the washing water into a water-replacing tank S4 used in the water-replacing step is provided with a measuring device 40 for measuring the degree of contamination of the washing water in the circulation tank with the developer component. When the degree of contamination measured by the measuring device is out of a previously set tolerance, washing water collected from a drainage D3 of washing water in the circulation tank and from the circulation tank to which washing water is collected form the washing tank is supplemented to adjust the degree of contamination within the tolerance. The conductivity of the washing water is used as the degree of contamination with the developer component. Two circulation tanks are juxtaposed as the circulation tank such that when the degree of contamination of the washing water in one circulation tank is out of the tolerance, it is switched to another circulation tank. COPYRIGHT: (C)2011,JPO&INPIT |
