发明名称 NEAR-FIELD OPTICAL MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To solve the problem, wherein the surface of a probe contaminated during the period between the preparation of the probe and measurement is reduce of Raman enhancement, and that Raman enhancement changes with the passage of time due to contamination, in a near-field optical microscope apparatus. SOLUTION: A transfer mechanism is provided between a metal film preparation unit and a measurement unit; by enabling a speedy transition to measurement, immediately after the preparation of a probe coated with a metal film, contamination of the probe due to the atmosphere is alleviated. Furthermore, by having each operation monitored from the preparation of the probe for measurement and Raman measurement and recording its time, reproducibility of measurement is enhanced. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011122896(A) 申请公布日期 2011.06.23
申请号 JP20090279913 申请日期 2009.12.09
申请人 CANON INC 发明人 NAGAO MASASHI
分类号 G01Q60/18;G01Q60/22 主分类号 G01Q60/18
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