发明名称 METHOD FOR MAKING A SEMICONDUCTOR DEVICE BY LASER IRRADIATION
摘要 The present invention is related to a method for making a semiconductor device comprising the steps of : exposing a semiconductor substrate to a process step or sequence of process steps of which at least one process performance parameter is determined in a region of the semiconductor substrate, and irradiating the region with a laser having laser irradiation parameters; characterized in that the irradiation parameters are determined based on the at least one process performance parameter.
申请公布号 WO2011073082(A1) 申请公布日期 2011.06.23
申请号 WO2010EP69300 申请日期 2010.12.09
申请人 EXCICO FRANCE;RACK, SIMON 发明人 RACK, SIMON
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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