发明名称 CRUCIBLE FOR PULLING SINGLE CRYSTAL, AND METHOD FOR PULLING SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a crucible for pulling single crystal and a method for pulling single crystal in which even when a silicon raw material melt is continuously or intermittently supplied to a quartz crucible and the level height position of the silicon raw material melt is substantially in a constant state in the silicon crucible, the damage of the quartz crucible resulting from erosion of the inner wall can be suppressed. SOLUTION: The quartz crucible 20 is provided with a side wall reinforcement part 22 composed of a quartz material at a predetermined height position H on the periphery of a side wall, forming a thick side wall part 23 in a part of the side wall. When the silicon single crystal 5 is pulled, the quartz crucible 20 is heated and softened, and the thick side wall part 23 is deformed according to the shape of the inner wall surface 30a of the graphite crucible 30 to thereby partially push out the thick side wall part 23 of the quartz crucible 20 to the inner surface side. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011121843(A) 申请公布日期 2011.06.23
申请号 JP20090282786 申请日期 2009.12.14
申请人 JAPAN SIPER QUARTS CORP;SUMCO CORP 发明人 KANDA MINORU;YOSHIOKA TAKUMA;KISHI HIROSHI
分类号 C30B29/06;C03B20/00;C30B15/10 主分类号 C30B29/06
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