| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a smaller power generation device for improving the efficiency of power generation by releasing the concentration of stress applied to a generator. <P>SOLUTION: The power generation device which is formed using a micromachining technique includes: a frame 1; a vibrator 2 formed inside the frame 1; a warpage 3 which connects the frame 1 and the vibrator 2 and is warped by displacement of the vibrator 2; and the generator 7 having a lower electrode 4, a piezoelectric layer 5 and an upper electrode 6, which are sequentially stacked on the warpage 3 from the lower layer, and generating an AC voltage in response to the vibration of the vibrator 2. In the device, the outer shape in plane view of the warpage 3 is substantially a trapezoid in which the frame 1 side is wider, and the frame 1 is formed so that an outer edge 8 and an inner edge 9 are each a substantial triangle along the outer shape of the warpage 3. <P>COPYRIGHT: (C)2011,JPO&INPIT |
