| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a positioning device for detecting positions of two objects mutually movably disposed in at least one measuring direction. <P>SOLUTION: The positioning device includes a light source and a light splitting device that split a light ray sent from the light source into two or more spectroscopic light fluxes. The spectroscopic light flux passes through at least two spectroscopic light paths. Since interfering spectroscopic light flux from the spectroscopic light path hits multiple photoelectric detecting elements, positional signals following displacement is detected through the detecting elements. The light source is configured as a semiconductor laser with a fiber lattice reverse coupling means. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
