| 摘要 |
PROBLEM TO BE SOLVED: To securely align a small diameter wafer and to transfer the wafer, without being affected by a shape of a robot hand which transfers the wafer. SOLUTION: A lift pin 18 of a lift mechanism 17 is vertically shifted, independently of a shifting operation of a placement section 11 for the wafer 20, in a planar direction operated by an X-axis shifting mechanism 15 and a Y-axis shifting mechanism 14. COPYRIGHT: (C)2011,JPO&INPIT |
