MANUFACTURING METHOD OF ORGANIC LIGHT-EMITTING DEVICE, AND ORGANIC LIGHT-EMITTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a new and improved organic light-emitting device and the organic light-emitting device without causing changes of characteristics of barrier layers even at a high temperature at a TFT process, not only enabling to enhance processing stability by the reduction of stress to substrates but also capable of mass-producing the substrates. SOLUTION: The manufacturing method of the organic light-emitting device includes a process for preparing a substrate 10, and a process forming a barrier layer 20 on the substrate 10. The process forming the barrier layer 20 includes a process for forming a barrier layer side first inorganic film 21 on the substrate 10, a process for forming a barrier layer side first organic film 22 composed of polyimide by heat treatment after the vapor-deposition of a monomer for polyimide formation on the barrier layer side first inorganic film 21 by the use of a thermal vapor deposition method, a plasma chemical vapor deposition or an atomic layer vapor deposition method, and a process for forming a barrier layer side second inorganic film 23 on the barrier layer side first organic film 22. COPYRIGHT: (C)2011,JPO&INPIT