LAMINATION METHOD AND LAMINATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a lamination method and a lamination device capable of obtaining lamination with stable quality by maintaining the temperature of a diaphragm for pressure bonding of a target from an initial stage of work at a constant level. SOLUTION: The lamination method for pressure bonding the target of a chamber includes: a step S110 of arranging the target in the chamber; a step S120 of making the diaphragm having an elastic material quality come into close contact with a first heater to preheat the diaphragm to a predetermined preheating temperature; and a step S130 of pressure bonding the target by the diaphragm. COPYRIGHT: (C)2011,JPO&INPIT