| 摘要 |
An electromagnetic multi-axis actuator, which can realize small size, light weight and low power consumption while being capable of performing multi-axis motion by overcoming limitations in a driving range, compared to a typical electrostatic actuation scheme or a typical electric motor actuating scheme. The electromagnetic multi-axis actuator includes an actuating unit (1) capable of being driven in a multi-axis manner, one or more elastic parts (2) connected to the actuating unit and made of a conductive material, and one or more coil substrates (3) disposed either above or below or both above and below the elastic parts and provided with conductive coils formed thereon to form magnetic fields around the elastic parts. The multi-axis actuator having the above construction can realize high response speed while having a driving range of high power caused by low power consumption, a large displacement, and multiple axes.
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